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Design of micro and nano systems

COURSE: Design of micro and nano systems

Code: FEIT01017

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Prof. Mile Stankovski, PhD

Subject of the course content: Introduction. Introducing the differences between microsystems and micro-electro-mechanical systems. Design techniques for micro and nano electro mechanical systems. Modeling of the different levels. Microfabrication. Explanation of the design integration process. Modeling techniques for micro and nano systems. Energy conversion transdusers.


  1. Stephen D. Senturia, “Microsystem design”, kluwer academic publishers, 2001.
  2. James J. Allen, “Micro Electro Mechanical system Design”,Taylor & Francis,2005.
  3. Milena Djukanovic, Goran Stojanovski, Lecture Notes on Microelectromechanical Systems, DRIIMS Tempus 2012.