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Micro and nano sensors

COURSE: Micro and nano sensors

Code: FEIT01016

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Prof. Mile Stankovski, PhD

Subject of the course content: Introduction to micro and nano mechatronic systems. Overview of the physical phenomena used for design and implementation of micro and nano sensors. Characterization of different types of MEMS based sensors. Detailed explanation of thermal MEMS, radiation MEMS, mechanical MEMS, magnetic MEMS, bio-chemical MEMS etc. Characterization and verification of sensor properties in laboratory.


  1. Milena Djukanovic, Goran Stojanovski, Lecture Notes on Microelectromechanical Systems, DRIIMS Tempus 2012.
  2. Stephen Beeby, Graham Ensell, Michael Kraft, Neil White, “MEMS Mechanical Sensors”, Artech House, Inc, 2004.
  3. Jan G. Korvink, Oliver Paul, “MEMS: A Practical Guide to Design, Analysis, and Applications”, William Andrew, Inc, 2006.